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[IEEE MELECON '94. Mediterranean Electrotechnical Conference - Antalya, Turkey (12-14 April 1994)] Proceedings of MELECON '94. Mediterranean Electrotechnical Conference - Analysis of the defects induced by boron implantation in silicon after sequential annealing processes
Plugaru, R., Gaiseanu, F., Bazu, M., Nistor, L.C.Year:
1994
Language:
english
DOI:
10.1109/melcon.1994.381021
File:
PDF, 193 KB
english, 1994