Electrical measurement of submicrometer contact holes

IEEE Transactions on Semiconductor Manufacturing 1989 / Aug. Vol. 2; Iss. 3

Electrical measurement of submicrometer contact holes

Lin, B.J., Underhill, J.A., Sundling, D.L., Peck, B.B.
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Volume:
2
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.29673
Date:
January, 1989
File:
PDF, 635 KB
english, 1989
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