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[IEEE 2010 International Conference on Enabling Science and Nanotechnology (ESciNano) - Kuala Lumpur, Malaysia (2010.12.1-2010.12.3)] 2010 International Conference on Enabling Science and Nanotechnology (ESciNano) - Heteroepitaxial growth of SiC at low temperatures for the application of a pressure sensor using hot-mesh CVD
Yasui, Kanji, Miura, Hitoshi, Eto, Jyunpei, Narita, Yuzuru, Hashim, Abdul ManafYear:
2010
Language:
english
DOI:
10.1109/escinano.2010.5701025
File:
PDF, 363 KB
english, 2010