Characterization of scraper-shaped defects on 4H-SiC...

Japanese Journal of Applied Physics 2014 / 05 Vol. 53; Iss. 5

Characterization of scraper-shaped defects on 4H-SiC epitaxial film surfaces

Sako, Hideki, Yamashita, Tamotsu, Sugiyama, Naoyuki, Sameshima, Junichiro, Ishiyama, Osamu, Tamura, Kentaro, Senzaki, Junji, Matsuhata, Hirofumi, Kitabatake, Makoto, Okumura, Hajime
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.051301
Date:
May, 2014
File:
PDF, 700 KB
english, 2014
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