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N-type porous silicon doping using phosphorous oxychloride (POCl3)
El-Bahar, A., Stolyarova, S., Nemirovsky, Y.Volume:
21
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.863102
Date:
September, 2000
File:
PDF, 50 KB
english, 2000