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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A vertically integrated nanoscale tipped microprobe intracellular electrode array
Kubota, Yoshihiro, Oi, Hideo, Sawahata, Hirohito, Goryu, Akihiro., Ando, Yoriko, Numano, Rika, Ishida, Makoto, Kawano, TakeshiYear:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765597
File:
PDF, 953 KB
english, 2014