[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Natural vibration frequencies of silicon diaphragms
Pons, P., Blasquez, G.Year:
1991
DOI:
10.1109/sensor.1991.148933
File:
PDF, 215 KB
1991