A Capacitive Humidity Sensor Suitable for CMOS Integration

IEEE Sensors Journal 2013 / 11 Vol. 13; Iss. 11

A Capacitive Humidity Sensor Suitable for CMOS Integration

Saeidi, Nooshin, Strutwolf, Jorg, Marechal, Amandine, Demosthenous, Andreas, Donaldson, Nick
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Volume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2013.2270105
Date:
November, 2013
File:
PDF, 2.17 MB
english, 2013
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