[IEEE 2011 International Semiconductor Device Research Symposium (ISDRS) - College Park, MD, USA (2011.12.7-2011.12.9)] 2011 International Semiconductor Device Research Symposium (ISDRS) - Ultra-shallow emitter formation for germanium bipolar transistor by diffusion from polycrystalline germanium
Li, Kezheng, Kong, Kok Hoe, Gamble, Harold, Armstrong, MervynYear:
2011
Language:
english
DOI:
10.1109/isdrs.2011.6135275
File:
PDF, 303 KB
english, 2011