GeTe Liner Stressor Featuring Phase-Change- Induced Volume...

IEEE Transactions on Electron Devices 2014 / 8 Vol. 61; Iss. 8

GeTe Liner Stressor Featuring Phase-Change- Induced Volume Contraction for Strain Engineering of Sub-50-nm p-Channel FinFETs: Simulation and Electrical Characterization

Cheng, Ran, Ding, Yinjie, Koh, Shao-Ming, Yang, Yue, Bai, Fan, Liu, Bin, Yeo, Yee-Chia
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2014.2328667
Date:
August, 2014
File:
PDF, 4.22 MB
english, 2014
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