[IEEE 2000 International Conference on Simulation of Semiconductor Processes and Devices - Seattle, WA, USA (6-8 Sept. 2000)] 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) - A mesh generation algorithm for complex geometry [semiconductor process modelling]
Sangho Yoon,, Ohseob Kwon,, Sukin Yoon,, Hyunsu Jung,, Taeyoung Won,Year:
2000
Language:
english
DOI:
10.1109/sispad.2000.871247
File:
PDF, 397 KB
english, 2000