Low-temperature plasma oxidation of GaAs

Applied Physics Letters 1978 Vol. 32; Iss. 1

Low-temperature plasma oxidation of GaAs

Yokoyama, N., Mimura, T., Odani, K., Fukuta, M.
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Volume:
32
Year:
1978
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.89839
File:
PDF, 485 KB
english, 1978
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