Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation
Park, Kidong, Kim, Namjung, Morisette, Dallas T., Aluru, N. R., Bashir, RashidVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2189359
Date:
June, 2012
File:
PDF, 1.23 MB
english, 2012