Modeling, Analysis and Control of Dual-Arm Cluster Tools...

Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

Nai Qi Wu,, MengChu Zhou,
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Volume:
9
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2011.2178023
Date:
April, 2012
File:
PDF, 791 KB
english, 2012
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