Impact of Phase Shifted Coil Currents on Plasma Uniformity

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Impact of Phase Shifted Coil Currents on Plasma Uniformity

Agarwal, Ankur, Banna, Samer, Todorow, Valentin, Rauf, Shahid, Collins, Ken
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Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2140337
Date:
November, 2011
File:
PDF, 372 KB
english, 2011
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