High-performance surface acoustic wave resonators in the 1...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2013 / 03 Vol. 60; Iss. 3

High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure

Hashimoto, K., Sato, S., Teshigahara, A., Nakamura, T., Kano, K.
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2013.2606
Date:
March, 2013
File:
PDF, 627 KB
english, 2013
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