[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Design and simulation of fully-symmetrical resonant pressure sensor
Jiang, Yiwen, Du, Xiaohui, Zhan, Zhan, Xu, Bulei, Lv, Wenlong, Wang, Lingyun, Sun, DaohengYear:
2012
Language:
english
DOI:
10.1109/nems.2012.6196872
File:
PDF, 1.23 MB
english, 2012