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[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - Fully integrated, high yielding, high reliability DC contact MEMS switch technology & control IC in standard plastic packages
Goggin, Ray, Fitzgerald, Padraig, Wong, Jo-ey, Hecht, Bruce, Schirmer, MarkYear:
2011
Language:
english
DOI:
10.1109/icsens.2011.6127072
File:
PDF, 1.43 MB
english, 2011