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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Realization of quartz MEMS accelerometer based on flip chip process
Liang, Jinxing, Cui, Sujin, Zhang, Liyuan, Shao, AnchengYear:
2013
Language:
english
DOI:
10.1109/nems.2013.6559933
File:
PDF, 646 KB
english, 2013