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Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections
Jung, Joontaek, Kim, Sangwon, Lee, Wonjun, Choi, HongsooVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125037
Date:
December, 2013
File:
PDF, 1.85 MB
english, 2013