Effect of RF power on the properties of transparent...

Chinese Physics 2007 / 02 Vol. 16; Iss. 2

Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

Mao-Shui, Lü, Zhi-Yong, Pang, Xian-Wu, Xiu, Ying, Dai, Sheng-Hao, Han
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Volume:
16
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/16/2/044
Date:
February, 2007
File:
PDF, 280 KB
english, 2007
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