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Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
Hanfa, Liu, Huafu, Zhang, Chengxin, Lei, Changkun, YuanVolume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/2/023001
Date:
February, 2009
File:
PDF, 162 KB
english, 2009