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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications
Robin, Renaud, Touati, Salim, Segueni, Karim, Millet, Olivier, Buchaillot, LionelYear:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752952
File:
PDF, 5.31 MB
english, 2008