Motion Characterizations of Lateral Micromachined Sensor Based on Stroboscopic Measurements
Ong, Andojo Ongkodjojo, Tay, Francis Eng HockVolume:
7
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2006.886871
Date:
February, 2007
File:
PDF, 978 KB
english, 2007