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[IEEE International Conference on Plasma Sciences (ICOPS) - Vancouver, BC, Canada (1993.06.7-1993.06.9)] International Conference on Plasma Sciences (ICOPS) - Design of a large-scale plasma source ion implantation experiment
Wood, B.P., Rej, D.J., Henins, I., Scheuer, J.T., Reass, W.A., Faehl, R.J., Nastasi, M.A., Olsher, R.H.Year:
1993
Language:
english
DOI:
10.1109/plasma.1993.593096
File:
PDF, 107 KB
english, 1993