Design Rule and Orientation Layout for MEMS Curved Beams on...

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

Design Rule and Orientation Layout for MEMS Curved Beams on Silicon

Tzung-Ming Chen,, Zhenyu Liu,, Korvink, Jan G, Wallrabe, Ulrike
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2048416
Date:
June, 2010
File:
PDF, 1.15 MB
english, 2010
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