A thin-film piezoelectric impact sensor array fabricated on...

IEEE Transactions on Magnetics 1995 / Nov. Vol. 31; Iss. 6

A thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

Imai, S., Tokuyama, M., Hirose, S., Burger, G.J., Lammerink, T.S.J., Fluitman, J.H.J.
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Volume:
31
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.490253
Date:
January, 1995
File:
PDF, 340 KB
english, 1995
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