![](/img/cover-not-exists.png)
Design and Fabrication of a Horn-Type Megasonic Waveguide for Nanoparticle Cleaning
Kim, Hyunse, Lee, Yanglae, Lim, EuisuVolume:
26
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2013.2238563
Date:
May, 2013
File:
PDF, 730 KB
english, 2013