Design and Fabrication of a Horn-Type Megasonic Waveguide...

Design and Fabrication of a Horn-Type Megasonic Waveguide for Nanoparticle Cleaning

Kim, Hyunse, Lee, Yanglae, Lim, Euisu
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Volume:
26
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2013.2238563
Date:
May, 2013
File:
PDF, 730 KB
english, 2013
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