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Study of the integrated growth of dielectric films on GaN semiconductor substrates
Yanrong Li,, Jun Zhu,, Wenbo Luo,Volume:
57
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2010.1677
Date:
October, 2010
File:
PDF, 566 KB
english, 2010