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[IEEE IEEE International Electron Devices Meeting - San Francisco, CA, USA (8-11 Dec. 2002)] Digest. International Electron Devices Meeting, - A novel stack capacitor cell for high density FeRAM compatible with CMOS logic
Hayashi, T., Igarashi, Y., Inomata, D., Ichimori, T., Mitsuhashi, T., Ashikaga, K., Ito, T., Yoshimaru, M., Nagata, M., Mitarai, S., Godaiin, H., Nagahama, T., Isobe, C., Moriya, H., Shoji, M., Ito, YYear:
2002
Language:
english
DOI:
10.1109/iedm.2002.1175899
File:
PDF, 270 KB
english, 2002