[IEEE Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing - Keystone, CO, USA (5-9 Aug. 1996)] Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing - Characteristics measurements of the 100×110 μm/sup 2/ fabricated micro mirror
Seok-Whan Chung,, Jong-Woo Shin,, Yong-Kweon Kim,, Ho-Seong Kim,, Lee, E., Bum-Kyoo Choi,, Se-Jin Ahn,Year:
1996
Language:
english
DOI:
10.1109/leosst.1996.540768
File:
PDF, 298 KB
english, 1996