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[IEEE International Electron Devices Meeting. Technical Digest. IEDM - San Francisco, CA, USA (10-13 Dec. 2000)] International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) - A high reliability metal insulator metal capacitor for 0.18 μm copper technology
Armacost, M., Augustin, A., Felsner, P., Feng, Y., Friese, G., Heidenreich, J., Hueckel, G., Prigge, O., Stein, K.Year:
2000
Language:
english
DOI:
10.1109/iedm.2000.904282
File:
PDF, 361 KB
english, 2000