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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Miniature gear reduction unit driven by a silicon electrostatic wobble motor
Paratte, L., Lorenz, H., Luthier, R., Clavel, R., de Rooij, I.F.Year:
1994
Language:
english
DOI:
10.1109/memsys.1994.555609
File:
PDF, 649 KB
english, 1994