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[IEEE ESSDERC 2010 - 40th European Solid State Device Research Conference - Sevilla, Spain (2010.09.14-2010.09.16)] 2010 Proceedings of the European Solid State Device Research Conference - Optimization of the crystallization phase of Rare-Earth aluminates For blocking dielectric application in TANOS type flash memories
Breuil, L., Adelmann, C., Van Den Bosch, G., Cacciato, A., Zahid, M.B., Toledano-Luque, M., Suhane, A, Arreghini, A., Degraeve, R., Van Elshocht, S., Debusschere, I., Kittl, J., Jurczak, M., Van HoudtYear:
2010
Language:
english
DOI:
10.1109/essderc.2010.5618182
File:
PDF, 761 KB
english, 2010