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[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Micromechanical tunneling probes and actuators on a silicon chip
Toshiyoshi, H., Mita, M., Goto, M., Hashiguchi, G., Fujita, P., Kobayashi, D., Endo, J., Wada, Y.Year:
1999
Language:
english
DOI:
10.1109/imnc.1999.797536
File:
PDF, 339 KB
english, 1999