[IEEE 2003 IEEE International Symposium on Semiconductor...

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[IEEE 2003 IEEE International Symposium on Semiconductor Manufacturing. Conference Proceedings - San Jose, CA, USA (30 Sept.-2 Oct. 2003)] 2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) - Correlations of ceria abrasives characteristics between calcination temperature and polishing performance

Nam-Soo Kim,, Kyung-Moon Kang,, Young-Sam Lim,, Jae-Hyun So,, Sung-Taik Moon,, Dong-Jun Lee,, Sang-Moon Jun,
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Year:
2003
Language:
english
DOI:
10.1109/issm.2003.1243323
File:
PDF, 291 KB
english, 2003
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