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[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Dry mechanical liftoff technology for metallization on parylene-C using SU-8
Chang, Jay Han-Chieh, Kang, Dongyang, Tai, Yu-ChongYear:
2012
Language:
english
DOI:
10.1109/nems.2012.6196776
File:
PDF, 864 KB
english, 2012