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[IEEE 2007 European Microwave Conference - Munich, Germany (2007.10.9-2007.10.12)] 2007 European Microwave Conference - Totally free-flexible membrane for low voltage MEMS metal contact switch
Segueni, Karim, Le Garrec, Loic, Rollier, Anne-Sophie, Robin, Renaud, Touati, Salim, Kanciurzewski, Alexandre, Buchaillot, Lionel, Millet, OlivierYear:
2007
Language:
english
DOI:
10.1109/eumc.2007.4405403
File:
PDF, 514 KB
english, 2007