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[IEEE 2010 12th Electronics Packaging Technology Conference - (EPTC 2010) - Singapore, Singapore (2010.12.8-2010.12.10)] 2010 12th Electronics Packaging Technology Conference - Fine tuning of negative photo-resist sidewall profiles for thick metal lift-off in applications of MEMS and advanced packaging
Lee, Yong Hean, Toh, Chee Chong, Chen, Ao, Abdullah, Zulkiflee, Zhang, QingxinYear:
2010
Language:
english
DOI:
10.1109/eptc.2010.5702659
File:
PDF, 1.43 MB
english, 2010