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[IEEE International Electron Devices and Materials Symposium - Hsinchu, Taiwan (12-15 July, 1994)] International Electron Devices and Materials Symposium - The characteristics of ammonia-annealed polysilicon thin-film transistors with plasma hydrogenation

Chien Kuo Yang,, Tan Fu Lei,, Chung Len Lee,
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Year:
1994
Language:
english
DOI:
10.1109/edms.1994.771273
File:
PDF, 364 KB
english, 1994
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