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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Silicon power microsensor with frequency range from DC to microwave
Kopystynski, P., Obermeier, E., Delfs, H., Loser, A.Year:
1991
DOI:
10.1109/sensor.1991.148956
File:
PDF, 387 KB
1991