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[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Electrostatic frequency tuning of thermal piezoresistive MEMS resonators
Hajjam, Arash, Rahafrooz, Amir, Pourkamali, SiavashYear:
2012
Language:
english
DOI:
10.1109/fcs.2012.6243687
File:
PDF, 902 KB
english, 2012