Model Calculation of SiC Oxidation Rates in the Thin Oxide...

Materials Science Forum 2009 Vol. 600-603

Model Calculation of SiC Oxidation Rates in the Thin Oxide Regime

Hijikata, Yasuto, Yamamoto, Takeshi, Yaguchi, Hiroyuki, Yoshida, Sadafumi
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.600-603.663
File:
PDF, 338 KB
english, 2009
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