![](/img/cover-not-exists.png)
[IEEE 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - singapore (2008.07.7-2008.07.11)] 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Conductive Atomic Force Microscopy failure analysis for SOI devices
Lim Soon-Huat,, Zheng Xinhua,, Chea-Wei, Teo, Narang, Vinod, Beng Hock, Teo, Chin, J.M.Year:
2008
Language:
english
DOI:
10.1109/ipfa.2008.4588162
File:
PDF, 1.98 MB
english, 2008