[IEEE 1989 International Conference on Microelectronic Test Structures - Edinburgh, UK (13-14 March 1989)] Proceedings of the 1989 International Conference on Microelectronic Test Structures - MOSFET effective dimensions determination for VLSI process evaluation
Tuinhout, H.P.Year:
1989
Language:
english
DOI:
10.1109/icmts.1989.39282
File:
PDF, 269 KB
english, 1989