A 3D finite element analysis coupled to the impedance...

IEEE Transactions on Magnetics 1996 / 5 Vol. 32; Iss. 3

A 3D finite element analysis coupled to the impedance boundary condition for the magnetodynamic problem in radiofrequency plasma devices

Louai, F.-Z., Benzerga, D., Feliachi, M., Bouillault, F.
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Volume:
32
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.497365
Date:
May, 1996
File:
PDF, 258 KB
english, 1996
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