[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading
Ando, T., Takumi, T., Sato, K.Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805470
File:
PDF, 3.67 MB
english, 2009