Adaptive Neuro-Fuzzy Inference System Modeling of MRR and...

IEEE Transactions on Automation Science and Engineering 2008 / 01 Vol. 5; Iss. 1

Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data

Lih Wen-Chen,, Bukkapatnam, S.T.S., Rao, P., Chandrasekharan, N., Komanduri, R.
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Volume:
5
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2007.911683
Date:
January, 2008
File:
PDF, 2.36 MB
english, 2008
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