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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - A micromachined robust humidity sensor for harsh environment applications
Don-Hee Lee,, Hyung-Ki Hong,, Chil-Keun Park,, Geun Ho Kim,, Young-Sam Jeon,, Jong Uk Bu,Year:
2001
Language:
english
DOI:
10.1109/memsys.2001.906602
File:
PDF, 376 KB
english, 2001