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Analysis of partly corrugated rectangular diaphragms using the Rayleigh-Ritz method
Byung Chai Lee,, Eun Sok Kim,Volume:
9
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.870066
Date:
September, 2000
File:
PDF, 220 KB
english, 2000